AlN , Aluminum Nitride

AlN is stable at inert gas atmosphere, melted around 2800℃, decomposed around 1800℃ in vacuum state. In the air, AlN is stable until 1370℃ because oxidized layer is built in more than 700℃. AlN is suitable for thermal resistant material because of its high electronic resistance and thermal conductivity, so that widely used in area of photoelectron, dielectric in resistor, high efficient radiator of electronic substrate, iron manufacture, IT.

Key Features

- High Thermal Conductivity

- Electrical Insulator

- Critical Thermal Management Material


- Crucibles

- PEC, Shadow Ring

- Gas Injector

■ Typical Properties of AIN

■ Thermal Conductivity (W/mK)