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ceramic coatings
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Engineering ceramics
SIC
Y2O3
AIN
Si3N4
SiO2
Ceramic coatings
engineering ceramics
SiC, Silicon carbide
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High strength
High hardness
Abrasion Resistance
•
Good high temperature properties
•
High thermal transfer coefficient
•
Good thermal shock resistance
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Supply high/low resistance
Y₂O₃, Yttria
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Excellent plasma resistance
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Electronical insulating properties
AlN, Aluminum Nitride
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High thermal conductivity
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Good thermal shock resistance
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Good electronical insulating
Si₃N₄, Silicon Nitride
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High toughness / Abrasion Resistance
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Good thermal shock resistance
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Electrical insulating
properties
SiO₂, Silica
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Excellent thermal / Electronical insulating properties
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Excellent thermal shock resistance
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Low thermal expansion coefficient
Al₂O₃, Alumina
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High purity / High strength / Abrasion resistance
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Plasma resistance / Chemical resistance
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Good dielectric behavior
ZrO₂, Zirconia
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High toughness /Abrasion resistance
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Good thermal shock resistance
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Electrical insulating
properties
BN, Boron nitride
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Excellent thermal / Electrical insulating properties
•
Excellent thermal shock resistance
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Low thermal expansion coefficient